NeoBeam™ Homogenizer

NeoBeam Homogenizer is a patent pending (US 11/847,013) optical device called a “Field-Mapped Beam Homogenizer”. This innovative optical device transforms a spatially, nonuniform light beam into a spatially homogeneous profile suitable for precision laser micromachining solar concentrators or as an illumination source for photolithography and TV projection displays.

The NeoBeam Homogenizer “field-maps” a homogenized illumination by using spherical, cylindrical, axicon or prism optical segments, or in some applications combination of these various elements, and placing the optical segments in a configuration whereby light passing through each optical segment directs the light to overlap at a homogenized plane with the desired shape (rectangle, square, rectangular or circular ring illumination). The geometry of the homogenized field is limited only by the fabrication techniques used in segmenting and how the segments are physically arranged.

The NeoBeam homogenizer in its basic form is fabricated from spherical or cylindrical lenses. The lenses can be either negative or positive, depending upon the type of illumination, size and numerical aperture required. different degrees of inverse taper can be realized.

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Features:

• Very Compact (requires less than 200mm of linear beam      delivery space!)
• Low Loss (only 2 optical surfaces)
• Easy to Align (single optical element)
• High Efficiency (single optical array with AR coating)
• No Focused Pupil to Damage Down Stream Optics (Footnote 1)
• Homogenized Field Adjustable Over a 3X Range (Footnote 2)

Specifications:

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Thin Film Removal
Precision Micromachining
Marking
Annealing
Welding
Blind Holes

Laser Types:

• Excimer
• Nd:YAG
• CO2

1. Requires negative focal length segments

2. Requires optional homogenizer zoom telescope which adds two optical elements and ~400 mm of linear beam delivery space

3. Wavelength range not continuous: longest continuous range is 193 nm to 2500 nm

4. For more than 80% of incoming energy